Buried channel waveguides made of silica films deposited on silicon substrates have been fabricated at low temperature (<100°C) without thermal annealing, using the Helicon plasma deposition technique. The guides have losses as low as 1 dB/cm. A 1 × 8 splitter comprising concatenated Y-junctions has been fabricated and characterised.
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Durandet et al. (1996) studied this question.
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