The helicon discharge has attracted growing interest as a dense plasma source (order of 1013 cm-3) for basic research and various practical applications. However, the problem of a high efficiency production mechanism for the helicon discharge remains to be solved. This mechanism is discussed in terms of a comparison between experimental and computed results, focusing on a mode conversion theory from helicons into slow waves (Trivelpiece-Gould mode). In addition, recent topics regarding helicon wave physics as well as plasma applications and future trends in utilizing this wave are highlighted.
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Shunjiro Shinohara (2002) studied this question.
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