Cluster beam microfabrication of patterns of three-dimensional nanostructured objects

This letter describes the use of supersonic cluster beam deposition (SCBD) through a stencil mask for the fabrication of patterns of cluster-assembled objects. Using carbon cluster beams, micrometer-size pillars and tips have been produced on a variety of substrates. SCBD is characterized by high deposition rates, high lateral resolution, and low temperature processing. Nanostructured objects can be produced with high aspect ratio and controlled shapes. Micropatterning with SCBD can be of interest for applications requiring the integration of cluster-assembled structures with microelectronic or micromechanical devices.