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October 30, 2007Plasma Sources Science and Technology

Heating of a dual frequency capacitively coupled plasma via the plasma series resonance

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Authors

ESEgmont SemmlerUniversity of GroningenPAPeter AwakowiczRuhr University BochumAKAchim von KeudellRuhr University Bochum

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Semmler et al. (2007) studied this question.

synapsesocial.com/papers/6a8932f99be9d02581bd49f1https://doi.org/10.1088/0963-0252/16/4/020
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