The chemical combination effects on the AI KLL Auger N′(E) peak from the oxide vs the metal results in an artifact in the profile contour region representative of the oxide-metal interface. The cause of the artifact is related to the nature of derivative recording of Auger spectra and the influence of peak shape changes because of a changing chemical environment. The artifact results in the misleading interpretation of a depletion of Al at the interface. To avoid this problem the N′(E) spectrum is integrated and N(E) peak heights are used to construct the profile.
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J. S. Solomon (1976) studied this question.
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