Simulation of the Electron Energy Relaxation in a Weakly Ionized Plasma

The motion of electrons in a weakly ionized plasma under the influence of an electric field is simulated by a Monte Carlo method. Elastic and inelastic electron-atom collisions are taken into account using the experimental cross sections. In an application to a low pressure argon positive column the temporal and spatial relaxation of the electron energy distribution is calculated for high electric fields (30 ≦ E/p0 ≦ V/cm Torr). The influence of the wall recombination and the anisotropy due to the high field can be shown.