A numerical study is made of the dynamics of Ar+ ions collected by a cylindrical Langmuir probe at medium He buffer gas pressure. The numerical model is based on a combination of PIC simulation for the ion component and fluid description for the electrons using the Boltzmann relation. The electric field is self‐consistently computed via the Poisson equation. The neutrals are modeled directly by an analytical method. The elastic collisions between Ar+ ions and He atoms are accounted for using a TPMC method based on the polarization potential theory. The results of the present simulation show the ion current peak observed experimentally at medium pressure regimes. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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