Langmuir probe measurements of weakly collisional electropositive RF discharge plasmas

We report on Langmuir probe measurements of low-pressure (0.1-20 Pa) electropositive plasmas in an RF discharge at 13.56 MHz. From the probe I - V characteristic it is found that the electron density inferred from the ion current in the ion saturation region using radial motion (Allen, Boyd and Reynolds, ABR) theory can be up to one-half that obtained directly from the electron current at the plasma potential. The reduction in the ion current is attributed to orbital motion (OM) of the ions and also to a small number of ion-neutral collisions in the presheath. We show that if a sufficiently large probe is chosen so as to minimize the OM effects then the collisional theory developed by Shih and Levi (1971) can be used to give an appropriate correction factor over a narrow pressure range. The corrected electron density is found to agree with the knee current value to typically 10% for Ar, N 2 and Kr plasmas.