Development of a Probe System for Measuring the Plasma Parameters and the High-Energy Part of the Electron-Energy Distribution Function

A probe system has been developed on the basis of an external ADC/DAC module (ADC is the analog-to-digital converter and DAC is the digital-to-analog converter). Using this system, it is possible to determine all the main plasma parameters of continuous and pulsed gas discharges. A program for the Windows operating system has been developed in C++ to control the probe system. The probe system can be used for diagnostics of plasma devices and can be included in modern microplasma analyzers of gas mixtures.