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January 1, 2019Physics of Plasmas

Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges

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KYKi-Pyo YouJeonbuk National UniversityJSJulian SchulzeRuhr University BochumADAranka DerzsiInstitute for Solid State Physics and Optics

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You et al. (2019) studied this question.

synapsesocial.com/papers/6a89369c1acf8e321fbd4b50https://doi.org/10.1063/1.5063543
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