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April 1, 1993Japanese Journal of Applied Physics

Lateral Supply Mechanisms in Selective Metalorganic Chemical Vapor Deposition

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KYKoichi YamaguchiUniversity of California, RiversideKOKotaro Okamoto Kotaro Okamoto

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Yamaguchi et al. (1993) studied this question.

synapsesocial.com/papers/6a893cff5c4c6b099dec63b8https://doi.org/10.1143/jjap.32.1523
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