Atomic layer control in Sr-Cu-O artificial lattice growth

Atomic layer growth control of the infinite-layer compound, SrCuO2, based artificial lattices is demonstrated on SrTiO3 (100). Two different patterns have been observed by reflection high-energy electron diffraction during the alternating supply of strontium and copper metal under the flow of NO2. The intensity of the incommensurate streak increases with an increasing supply of Cu and decreases to zero with an increasing supply of Sr. Precise control of atomic layer growth is successfully carried out by in situ intensity monitoring of the incommensurate streak.