A butterfly vane valve is described for the servo control of a gas or liquid flow. The valve is suitable for reactive species since nearly all wetted parts are Teflon. The valve is operated by a servo motor that is controlled by a dedicated microprocessor programmed in BASIC. The valve offers many other desirable features, including constant and relatively small surface area, low dead volume, high conductance in the full-open position, vacuum compatibility, firmware control, and scalability.
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Gao et al. (1999) studied this question.
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