In the acid generation processes of chemically amplified electron beam and X-ray resists, protons come from not acid generators but base polymers. This means that the selection of base polymers has a great effect on the acid generation efficiency. In this article we describe a convenient method of screening polymers for acid generation. We also showed the difference in acid generation efficiencies among substituted polystyrenes.
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Yamamoto et al. (2004) studied this question.
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