Ferroelectric thin films of Pb(Zr,Ti)O 3 (PZT) were prepared by chemical solution deposition (CSD). The top electrodes of platinum (Pt), SrRuO 3 (SRO), and IrO 2 thin films are deposited on the PZT thin films by RF magnetron sputtering (RF) and the pulsed laser deposition (PLD) methods, respectively. The polarization fatigue of ferroelectric thin-film capacitors is investigated. As a result, the remanent polarization value of the PZT thin films of SRO/PZT/PT/Pt/TiO x /SiO 2 /Si and IrO 2 /PZT/PT/Pt/TiO x /SiO 2 /Si remains more than 10 11 switching cycles at constant value and the value of the PZT thin films of Pt/PZT/PT/Pt/TiO x /SiO 2 /Si decreases to approximately 50% of its initial value at 10 8 cycles. It is confirmed that polarization fatigue is improved using SRO and IrO 2 thin-film electrodes as top electrodes.
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Masuda et al. (2003) studied this question.
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