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September 29, 1994Electronics Letters

Silicon micromachining for micro-replicationtechnologies

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Authors

RKRolf KleinUniversity of BonnANA. NeyerTU Dortmund University

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Klein et al. (1994) studied this question.

synapsesocial.com/papers/6a896922176d2ac34cfb9b4chttps://doi.org/10.1049/el:19941121
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