Enhanced UV Photodetector Response of ZnO/Si With AlN Buffer Layer

Studies have been carried out on the enhancement of responsivity and detectivity of the ZnO thin-filmsbased ultraviolet photodetectors by introducing an AlN buffer layer on silicon substrate. The ZnO film grown with AlN buffer layer established an epitaxial relation with the substrate and was found to show improved crystallinitywith excellent optical properties. A strong and narrow photoluminescence emission was observed on the ZnO film grown with buffer layer, while a defect related broad emission was dominated on the film without buffer layer. The photodetectors showed a higher responsivity (Rλ) of 1.03 × 104A/W with a specific detectivity(D*) of 5.21 × 1012cm · Hz1/2· W-1at an applied bias of 3 V due to their excellent crystal quality.