Passively aligned hybrid integration of 8 x 1 micromachined micro-Fresnel lens arrays and 8 x 1 vertical-cavity surface-emitting laser arrays for free-space optical interconnect

Surface micromachining technique has been successfully applied to the fabrications of a three-dimensional 8/spl times/1 micro-Fresnel lens array and other novel three-dimensional alignment structures. With the help of these three-dimensional structures, self-aligned integration of the micro-Fresnel lens array and an 8/spl times/1 vertical-cavity surface-emitting laser (VCSEL) array is realized for the first time with passive alignment. Individual addressing of the VCSEL/micro-lens element is also successfully demonstrated. With their three-dimensional and array structural characteristics, they are very attractive for free-space optical interconnect and other integrated micro-optical systems.>