Fabrication of SrTiO 3 thin films on quartz glass and Si(100) single crystal substrates was achieved by firing an adhered precursor at 600 °C in air. The precursor ethanolic solution was prepared by mixing ethanol solutions of a Ti(IV) complex and of an Sr(II) salt of edta in the presence of dibutylamine. The solution of the Ti(IV) complex was prepared by reaction of neutral [Ti(H 2 O)(edta)] with dibutylamine and 4-(N,N-dimethylamino)pyridine (DMAP) in ethanol. The solution containing Sr(II) was obtained by reaction of Sr(H 2 edta)·3H 2 O with dibutylamine in ethanol. It was elucidated by XRD that perovskite-type SrTiO 3 film formation was attainable by employing the mixed precursor derived from the stable Ti(IV) metal complex and Sr(II) salt, with no evidence for polymerization. A facile preparation for the precursor ethanolic solution and the properties of the precursor powder elucidated by evaporation of the precursor solution are also reported, along with the optical properties of a thin film on quartz glass.
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Sato et al. (1999) studied this question.