The vibrational properties of ultrathin (8--15 {}) aluminum oxide films deposited on a Mo(110) substrate are studied with use of high-resolution electron-energy-loss spectroscopy (EELS) under specular-scattering conditions. It is found that remarkable intensity changes in the low-frequency (400-cm^-1) optical-phonon mode can be induced by varying the extent of oxidation in the thin film. Two types of characteristic phonon energy-loss spectra are obtained from EELS measurements, which correspond to Al-rich nonstoichiometric films and fully-oxidized aluminum oxide films, respectively. Conversion between the two types of oxide films can be achieved by chemical means. By means of combined EELS and Auger-electron-spectroscopy studies, spectroscopic criteria for complete oxidation are provided for the aluminum oxide thin films. Possible structure changes following the process of complete oxidation are discussed.
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Chen et al. (1990) studied this question.
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