Local Gating of Carbon Nanotubes

Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo “finger gates” (∼150 nm × 10 nm). Prior to tube growth, several finger gates were patterned lithographically and subsequently coated with a patterned high-κ dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have an effect that is distinct from that of a global backgate.