Interactions between microstructure and magnetic properties in Fe-Cr sputtered films were investigated in the composition range 40–60 at. % Cr by studying films annealed after deposition. Saturation magnetization, perpendicular magnetic anisotropy, and perpendicular coercivity increase remarkably by annealing in the Fe-Cr films deposited at high Ar pressure. Film structure and magnetic properties of the Fe-Cr films depend strongly both on the Ar pressure and on the substrate bias during sputtering. If the energy of the incident particles is low, phase separation to the α and σ phases is prominent, and saturation magnetization is small. An increase in Ms, Ku, and Hc with annealing is associated with the further precipitation of Fe, changing saturation magnetization of the α phase.
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M. Ohkoshi (1988) studied this question.
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