The generation of x rays from the interaction of low-energy (10–50 mJ) 120-ps KrF laser pulses with solid targets has been experimentally investigated. Conversion efficiency as a function of laser energy and detailed keV x-ray spectra have been obtained for targets (Fe, Ni, and Cu) with potential application in high-resolution x-ray lithography. Peak x-ray conversion efficiencies of over 3% in the 800–1400-eV photon energy band have been measured for laser intensities of 1.5 × 1014 W/cm2. In addition, transmission grating spectra have been obtained to characterize the overall distribution of x-ray emission at photon energies down to 100 eV.
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Broughton et al. (1992) studied this question.
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