The spatial resolution of a Schwarzschild objective was evaluated at the wavelength of 135 Å by means of an apparatus constructed using the knife-edge method which is suitable to the measurement of higher resolution. The knife-edge response of the objective was measured with the apparatus. Then the results were compared with the theoretical responses calculated using ray tracing. It is found that the measured responses of the objective are almost the same as the theoretical ones. We conclude that the objective has the spatial resolution of 0.2 µm.
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Iketaki et al. (1993) studied this question.
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