Synthesis of silicon oxide nanowires and nanotubes with cobalt-palladium or palladium catalysts

The dewetting behaviors of cobalt (Co), cobalt palladium (CoPd), and palladium (Pd) thin films on oxidized silicon substrates were examined. We observed the formation of craters in the oxide layer and pits in the Si substrate for larger CoPd or Pd catalyst particles and thinner oxide. Nanowires and nanotubes were observed near the Si pits. The nanowires and nanotubes grow via a vapor-solid-solid or vapor-liquid-solid mechanism with the silicon vapor source provided from the substrate. The original Si atoms that form the nanowires or nanotubes were oxidized in situ by the residual oxygen atoms present in the chamber. Some of the nanotubes had a series of embedded sub-catalysts that formed branches from the primary nanotube.