Low-temperature sputter deposition of high-T c superconducting niobium-germanium films

Sputter-deposited ’’Nb3Ge’’ films have been found to be fully superconducting at temperatures as high as 20.8 K with an onset of 21.8 K. Conditions under which high-Tc films were formed were unique in that the highest Tc’s were obtained at deposition temperatures nearly 200 °C lower than previously reported.