Thin film layered structures for surface acoustic wave (SAW) and acousto-optic devices, which utilize the piezoelectric property of one layer and the photoelastic property of the other layer are reported. Three different structures, Si-ZnO-TeO 2 , Si-SiO 2 -TeO 2 -ZnO and Si-SiO 2 -ZnO, having interdigital transducers (IDTS) on the top layer have been studied, and it is shown that the Si-SiO 2 -TeO 2 -ZnO structure provides the highest acousto-optic figure of merit and electromechanical coupling for a SAW.
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Jain et al. (1992) studied this question.
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