Enhancement of the maximum energy density in atomic layer deposited oxide based thin film capacitors

Thin film capacitors on areas up to 6 mm2 have been measured regarding capacitance density, relative permittivity, and electrical breakdown. The maximum storable energy density of the thin film capacitors will be discussed as a parameter to evaluate the thin film capacitors applicability. Therefore the measurements of the layer thickness, capacitance density, and the breakdown voltage were combined to achieve the maximum storable areal and volume energy density depending on the dielectric layer thickness. Thickness dependent volume energy densities of up to 50 J/cm3 for pure Al2O3 and 60 J/cm3 for Al2O3/TiO2 nanolaminates were reached.