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The macroparticle content of titanium films deposited using a steered vacuum cathodic arc has been investigated. It has been found that the macroparticle number decreases with increasing steering magnetic field strength, and experimental results are found to be consistent with the model in which the number and mass of macroparticles arising from a cathode spot are proportional to the cathode spot volume.
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P. Swift (1996) studied this question.
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