Demixing of Solid-Soluted Co–Pd Binary Alloy Induced by Microwave Plasma Hydrogen Irradiation Technique

Demixing in a solid-soluted Co–40 at. % Pd alloy has been induced by microwave plasma hydrogen irradiation on mixture of Pd–Co island grains on Si substrate. The microstructure observation and X-ray microanalysis by a transmission electron microscope before and after the microwave plasma hydrogen irradiation provide a clear evidence of demixing in metallic Co–Pd alloys, that may indicate a possibility of the decomposition into Pd hydride and Co under a hydrogen irradiation at high temperatures.