Fluid model based numerical analysis is done to simulate a plasma processing system with electrodes at floating potential. Vf is a function of electron temperature, electron mass and ion mass. Commercial plasma fluid simulation softwares do not provide options for floating electrode boundary value condition. We developed a user subroutine in CFD-ACE+ and compared four different cases: grounded, dielectric, zero normal electric field and floating electric potential for a 2D-CCP (capacitively coupled plasma) with a ring electrode.
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Junghoon Joo (2015) studied this question.
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