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The Pb(Zr1−xTix)O3 multilayered films consisting of Pb(Zr0.8Ti0.2)O3 and Pb(Zr0.2Ti0.8)O3 layers with different orientations were deposited by radio frequency magnetron sputtering with PbOx and LaNiO3 (LNO) buffer layers. The PbOx and LNO buffer layers lead to the (001)∕(100) and (101)∕(110) orientations of the multilayered films, respectively. The orientation dependence of electrical properties of the multilayered films was investigated. Enhanced remnant polarization (2Pr=79.3μC∕cm2) and dielectric constant (εr=857) were obtained for the multilayered films with (001)∕(100) orientation as compared to those of the multilayered films with other orientations. These results reveal that the orientation control is important in obtaining good electrical properties.
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Wu et al. (2007) studied this question.
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