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Characterization of Threading Dislocations in Thin Germanium Layers by Defect Etching: Toward Chromium and HF-Free Solution, Souriau, L., Atanasova, T., Terzieva, V., Moussa, A., Caymax, M., Loo, R., Meuris, M., Vandervorst, W.
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Souriau et al. (2008) studied this question.
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