The measurement of the trace Li content and distribution in ZnO films and the thickness of these films

The content and distribution of trace Li in ZnO films and the thickness of these films have been determined with reaction 7Li (p,α) 4He. An approximate and simple method used to determine the content of the trace element by the yield of thin standard target at an average energy has been established. This average energy can be found from the spectrum of the emerging particle or from the Rutherford backscattering spectrum of incident protons.