A fully automated system is described that utilises white light interferometry to accurately measure the spacing between two plates. The system measures spacing in the range from 0 to 2 mm, with 5 µm accuracy, at operating temperatures spanning at least 0–70°C. Results of measurements verifying this performance are presented. The system is immune from both fibre chromatic dispersion and spurious optical path differences introduced by environmental changes.
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Shafir et al. (2011) studied this question.
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