The parameters of ytterbium implantation in CdS, ZnS and ZnSe

The intensity of the characteristic Yb3+ cathodoluminescence emission spectrum has been used to monitor the implantation of ytterbium in cadmium supplied, zinc sulphide and zinc selenide. The effects on the implantation of varying ion fluency, ion flux, implant temperature and anneal temperature have been studied and found to be important. Optimum values of these parameters for ytterbium implantation have been determined. It has been shown that implantation at liquid helium temperatures rather than at higher temperatures can lead to greater structure in the emission spectrum of the implanted ion, and sometimes to greater intensity also. Emission intensity did not decrease monotonically with ion flux but reached a peak at an ion flux of 0μ2 μA cm−2 for annealed cadmium sulphide samples.