Database of correction parameters for the elastic scattering effects in XPS

The common formalism of quantitative XPS can be easily modified, with two additional correction factors β eff and Q x , to account for the elastic scattering effects. These corrections, for a given solid, depend on photolectron line, the radiation used and the XPS configuration. The database compiled in the present work contains parameters describing the dependence of the correction factors on experimental geometry. These dependences are listed for 496 photoelectron lines emitted by the Mg Kα and Al Kα radiations. The database makes it possible to predict the photoelectron intensity in a geometry in which the direction of x‐rays, the direction towards the analyser, and the surface normal are situated in one plane. This intensity corresponds to a theoretical model taking into account the elastic photoelectron collisions. Examples of applications of the database are briefly demonstrated.