A Piezoelectric Two-Degree-of-Freedom Nanostepping Motor With Parallel Design

This letter proposes a parallel design for a piezoelectric two-degree-of-freedom nanostepping motor, which performs translation or rotation while its two piezoelectric elements are driven in-phase or out-of-phase electrically. Compared to serial mechanism, parallel designs are more compact, stiffer, and have better dynamical characteristics. Experimental results show that this device works stably. The stepping resolution/stroke values of translation and rotation are 100 nm/6 mm and 0.04°/infinite, respectively.