High resolution 50 nm linear displacement macroscale meander-line PZT actuator

A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.