The parameters, which determine the performance of ozone generators, are efficiency and maximum ozone concentration. The efficiency from oxygen has been found to be nearly independent on the kind of barrier discharge arrangement (volume, surface, coplanar), while the ozone concentration saturation level depends on the specific design of the generator. These phenomena are explained with features of the discharge process and the properties of chemical reactions, respectively. The importance of a limit in the energy density of the discharge is highlighted.
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Gibalov et al. (2006) studied this question.
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