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The surface morphology of HVPE layers typically shows a high density of pyramidal structures which makes some polishing step necessary before their subsequent use in the next epitaxial growth. We found that a slight misorientation of the substrate totally suppresses the development of these pyramidal structures. The misorientation angle was varied between 0° and 0.6°. We did not observe any influence of the direction of miscut. Surface roughness measurements exhibited, that these HVPE grown layers on miscut templates had a comparably flat surface to MOVPE grown samples. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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Brückner et al. (2006) studied this question.
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