Analysis of diffraction by surface-relief crossed gratings with use of the Chandezon method: application to multilayer crossed gratings

A new formulation of the Chandezon method for crossed gratings is presented. In the nonorthogonal translation coordinate system, an arbitrary field in a homogeneous source-free region can be expressed as the sum of a TE field and a TM field. It is shown that the whole solution can be derived from the eigensolutions of an operator independent of the polarization. In addition, use is made of the S-matrix formalism to include multilayer coated crossed gratings with parallel faces. Numerical results are given for sinusoidal crossed gratings and pyramidal gratings.