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The importance of reliable spectral transmittance measurements for reliable thin-film characterization is demonstrated. By using a model of the spectral transmittance of thin-film samples, the effect of various uncertainty components in transmittance measurements on the determined thin-film parameters is analysed. The experimental results for aluminium dioxide and tantalum pentoxide thin-film samples show good agreement with the model.
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Nevas et al. (2003) studied this question.
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