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Thin films of LiNbO3 have been formed on AlN films (AlN/sapphire) by pulsed laser deposition. The epitaxial growth of LiNbO3 films is confirmed by X-ray pole figure analysis. Theoretical calculation of surface acoustic wave (SAW) properties has been performed for LiNbO3/AlN/sapphire. Preliminary results of experimental SAW properties have been shown.
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Shibata et al. (1995) studied this question.
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