A review of Ga + FIB/SIMS

FIB/SIMS analyses has been performed and reported for well over a decade, however, only within limited research groups due to the lack of commercial FIB/SIMS instrumentation. Commercial availability of FIB/SIMS failed mainly due to two reasons: (i) the low secondary ion yields from the primary Ga + source; and (ii) unrealistic expectations in sensitivity detection limits using the small FIB source. Despite the low yields and limits in sensitivity detection limited by the small volume of material analyzed, FIB/SIMS is extremely useful for conventional ppm SIMS analysis as well as high‐spatial resolution analyses.