Polymeric cyanoborane, (CNBH 2 ) n , is a material readily prepared by passing hydrogen chloride through an ether suspension of sodium cyanotrihydroborate. This polymeric material was volatilized in a CVD reactor to produce, at 600°C, amorphous films containing boron, nitrogen, and carbon. Residual carbon present in the films was removed by ammonia treatment at 800°C, producing nearly stoichiometric boron nitride films that were adherent to a variety of substrates including silicon.
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Maya et al. (1991) studied this question.
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