Creation of Nanoscale Two-Dimensional Patterns of ZnO Nanorods using Laser Interference Lithography Followed by Hydrothermal Synthesis at 90 °C

Arrayed ZnO nanorods were fabricated on photoresist coated ZnO/Si(100) substrates. Five different two-dimensional (2D) periodic nanopatterns, including a square lattice, rectangular lattice, centered rectangular lattice, oblique lattice, and hexagonal lattice, of opening windows in photoresist were fabricated by laser interference lithography using a two-step exposure process. The ZnO nanorods were grown through the patterned area by a hydrothermal method. The morphology of 2D nanopatterns and ZnO nanorods was investigated by atomic force microscopy, scanning electron microscopy and transmission electron microscopy. The optical property of ZnO nanorods was explored by room temperature photoluminescence. The height and diameter of ZnO nanorods were approximately 500 nm and 150 nm, respectively. The crystallinity, microstructure, and optical property of ZnO nanorods array could be controlled by the proper use of a surfactant chemical, that is, Na-citrate in this report.