An ESCA investigation of the inductively coupled RF plasma polymerization of fluoronaphthalene and fluoronaphthalene/hydrogen mixtures

Abstract 1‐Fluoronaphthalene was plasma polymerized and its composition and structure, as a function of position, power, and temperature, were examined by ESCA. The F:C ratio of the deposited film was lower than that of the starting monomer both at room temperature and at 150°C. An asymmetry of the main C1s photoionization peak was noted. Plasmas were also excited in fluoronaphthalene/hydrogen mixtures where extensive fluorine elimination and hydrogen incorporation occurred. This gave direct evidence that the height of step function or asymmetry of the main C1s peak is related to the degree of saturation in the compound.