SrS thin films were grown on uncoated or Al2O3‐coated soda lime glass substrates from hydrogen sulfide and Sr(thd)2 (thd = 2,2,6,6‐tetramethyl‐3,5‐heptanedionato) by the atomic layer epitaxy (ALE) process. Sr(thd)2 was prepared from Sr, SrO, Sr(OH)2 or SrCO3 and Hthd inside the reactor during the deposition process. Thicknesses of the thin films were measured by optical transmission spectroscopy while crystallinity and preferred orientation were evaluated by X‐ray diffraction. Under certain conditions strongly (200) oriented SrS was grown. The advantages of the in situ synthesis of the precursor are discussed.
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Soininen et al. (1996) studied this question.
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