The application of rare gas halide UV-lasers for impurity diagnostics of plasmas by fluorescence spectroscopy is proposed. An argon fluoride laser ( lambda =193 nm) is used to excite carbon atoms from the lowest metastable level at 1.26 eV; the subsequent fluorescence radiation ( lambda =248 nm) allows the determination of their concentration. Measurements and absolute calibration are described and discussed.
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Döbele et al. (1982) studied this question.
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